Nano-cutting mechanism of ion implantation-modified SiC: reducing subsurface damage expansion and abrasive wear.

This study utilized ion implantation to modify the material properties of silicon carbide (SiC) to mitigate subsurface damage during SiC machining. The paper analyzed the mechanism of hydrogen ion implantation on the machining performance of SiC at the atomic scale. A molecular dynamics model of nanoscale cutting of an ion-implanted SiC workpiece using a non-rigid regular tetrakaidecahedral diamond abrasive grain was established. The study investigated the effects of ion implantation on crystal structure phase transformation, dislocation nucleation, and defect structure evolution. Results showed ion implantation modification decreased the extension depth of amorphous structures in the subsurface layer, thereby enhancing the surface and subsurface integrity of the SiC workpiece. Additionally, dislocation extension length and volume within the lattice structure were lower in the ion-implanted workpiece compared to non-implanted ones. Phase transformation, compressive pressure, and cutting stress of the lattice in the shear region per unit volume were lower in the ion-implanted workpiece than the non-implanted one. Taking the diamond abrasive grain as the research subject, the mechanism of grain wear under ion implantation was explored. Grain expansion, compression, and atomic volumetric strain wear rate were higher in the non-implanted workpiece versus implanted ones. Under shear extrusion of the SiC workpiece, dangling bonds of atoms in the diamond grain were unstable, resulting in graphitization of the diamond structure at elevated temperatures. This study established a solid theoretical and practical foundation for realizing non-destructive machining at the atomic scale, encompassing both theoretical principles and practical applications. .

Effects of Digitization of Self-Monitoring of Blood Glucose Records Using a Mobile App and the Cloud System on Outpatient Management of Diabetes: Single-Armed Prospective Study.

BACKGROUND: In recent years, technologies promoting the digitization of self-monitoring of blood glucose (SMBG) records including app-cloud cooperation systems have emerged. Studies combining these technological interventions with support from remote health care professionals have reported improvements in glycemic control. OBJECTIVE: To assess the use of an app-cloud cooperation system linked with SMBG devices in clinical settings, we evaluated its effects on outpatient management of diabetes without remote health care professional support. METHODS: In this multicenter, open-label, and single-armed prospective study, 48 patients with diabetes (including type 1 and type 2) at 3 hospitals in Japan treated with insulin or glucagon-like peptide 1 receptor agonists and performing SMBG used the app-cloud cooperation system for 24 weeks. The SMBG data were automatically uploaded to the cloud via the app. The patients could check their data, and their attending physicians reviewed the data through the cloud prior to the patients' regular visits. The primary outcome was changes in glycated hemoglobin (HbA1c) levels. RESULTS: Although HbA1c levels did not significantly change in all patients, the frequency of daily SMBG following applying the system was significantly increased before induction at 12 (0.60 per day, 95% CI 0.19-1.00; P=.002) and 24 weeks (0.43 per day, 95% CI 0.02-0.84; P=.04). In the subset of 21 patients whose antidiabetic medication had not been adjusted during the intervention period, a decrease in HbA1c level was observed at 12 weeks (P=.02); however, this significant change disappeared at 24 weeks (P=.49). The Diabetes Treatment Satisfaction Questionnaire total score and "Q4: convenience" and "Q5: flexibility" scores significantly improved after using the system (all P<.05), and 72% (33/46) patients and 76% (35/46) physicians reported that the app-cloud cooperation system helped them adjust insulin doses. CONCLUSIONS: The digitization of SMBG records and sharing of the data by patients and attending physicians during face-to-face visits improved self-management in patients with diabetes. TRIAL REGISTRATION: Japan Registry of Clinical Trials (jRCT) jRCTs042190057; https://jrct.niph.go.jp/en-latest-detail/jRCTs042190057.

Highly Stretchable, Knittable, Wearable Fiberform Hydrovoltaic Generators Driven by Water Transpiration for Portable Self-Power Supply and Self-Powered Strain Sensor.

The development of excellently stretchable, highly mobile, and sustainable power supplies is of great importance for self-power wearable electronics. Transpiration-driven hydrovoltaic power generator (HPG) has been demonstrated to be a promising energy harvesting strategy with the advantages of negative heat and zero-carbon emissions. Herein, this work demonstrates a fiber-based stretchable HPG with the advantages of high output, portability, knittability, and sustainable power generation. Based on the functionalized micro-nano water diffusion channels constructed by the discarded mask straps (MSs) and oxidation-treated carbon nanomaterials, the applied water can continuously produce electricity during the spontaneous flow and diffusion. Experimentally, when a tiny 0.1 mL of water encounters one end of the proposed HPG, the centimeter-length device can yield a peak voltage of 0.43 V, peak current of 29.5 µA, and energy density of 5.833 mW h cm-3. By efficiently integrating multiple power generation units, sufficient output power can be provided to drive commercial electronic devices even in the stretched state. Furthermore, due to the reversibility of the electrical output during dynamic stretching-releasing, it can passively convert physiological activities and motion behaviors into quantifiable and processable current signals, opening up HPG's application in the field of self-powered wearable sensing.

Highly sensitive piezoresistive and thermally responsive fibrous networks from the in situ growth of PEDOT on MWCNT-decorated electrospun PU fibers for pressure and temperature sensing.

Flexible electronics have demonstrated various strategies to enhance the sensory ability for tactile perception and wearable physiological monitoring. Fibrous microstructures have attracted much interest because of their excellent mechanical properties and fabricability. Herein, a structurally robust fibrous mat was first fabricated by electrospinning, followed by a sequential process of functionalization utilizing ultrasonication treatment and in situ polymerization growth. Electrospun polyurethane (PU) microfibers were anchored with multi-walled carbon nanotubes (MWCNTs) to form conductive paths along each fiber by a scalable ultrasonic cavitation treatment in an MWCNT suspension. After, a layer of poly(3,4-ethylene dioxythiophene) (PEDOT) was grown on the surface of PU fibers decorated with MWCNTs to enhance the conductive conjunctions of MWCNTs. Due to the superior electromechanical behaviors and mechanical reinforcement of PEDOT, the PEDOT/MWCNT@PU mat-based device exhibits a wide working range (0-70 kPa), high sensitivity (1.6 kPa-1), and good mechanical robustness (over 18,000 cycles). The PEDOT/MWCNT@PU mat-based sensor also demonstrates a good linear response to different temperature variations because of the thermoelectricity of the PEDOT/MWCNT composite. This novel strategy for the fabrication of multifunctional fibrous mats provides a promising opportunity for future applications for high-performance wearable devices.

Ag Nanoparticle-Thiolated Chitosan Composite Coating Reinforced by Ag-S Covalent Bonds with Excellent Electromagnetic Interference Shielding and Joule Heating Performances.

Conductive composite coatings are an important element in flexible electronics research and are widely used in energy transformation, artificial intelligence, and electronic skins. However, the comparatively low electrical conductivity limits their performance in many specific applications, such as electromagnetic interference (EMI) shielding and Joule heating devices. Therefore, the preparation of ultrahigh-electrical conductivity composite coatings with good flexibility and durability remains a great challenge. Herein, we fabricated multifunctional conductive composite coatings based on thiolated chitosan (TCS) and Ag nanoparticles (AgNPs) by an eco-friendly drop-coating method. The three-dimensional conductive network constructed by thermal sintering imparted the coating with an ultrahigh electrical conductivity of up to 67079.4 S/m. Moreover, the coating reinforced by Ag-S covalent bonding exhibits good stability, including heat resistance, chemical resistance, and mechanical stability. In addition, based on the ultrahigh electrical conductivity, the coating exhibits superior EMI shielding effectiveness and Joule heating capability. With 30 wt % of AgNPs in the coating, the EMI shielding effectiveness of the coating reaches 70.2 dB, far exceeding commercial standards. Additionally, the coating can quickly reach a saturation temperature (Ts) of 195.9 °C at a safe drive voltage of 3 V. These excellent performances demonstrate that the robust and flexible highly conductive composite coatings prepared by this method have attractive potential for EMI shielding and thermal management applications as well as in wearable electronics.

Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments.

Microelectromechanical system (MEMS) pressure sensors based on silicon are widely used and offer the benefits of miniaturization and high precision. However, they cannot easily withstand high temperatures exceeding 150 °C because of intrinsic material limits. Herein, we proposed and executed a systematic and full-process study of SiC-based MEMS pressure sensors that operate stably from -50 to 300 °C. First, to explore the nonlinear piezoresistive effect, the temperature coefficient of resistance (TCR) values of 4H-SiC piezoresistors were obtained from -50 to 500 °C. A conductivity variation model based on scattering theory was established to reveal the nonlinear variation mechanism. Then, a piezoresistive pressure sensor based on 4H-SiC was designed and fabricated. The sensor shows good output sensitivity (3.38 mV/V/MPa), accuracy (0.56% FS) and low temperature coefficient of sensitivity (TCS) (-0.067% FS/°C) in the range of -50 to 300 °C. In addition, the survivability of the sensor chip in extreme environments was demonstrated by its anti-corrosion capability in H2SO4 and NaOH solutions and its radiation tolerance under 5 W X-rays. Accordingly, the sensor developed in this work has high potential to measure pressure in high-temperature and extreme environments such as are faced in geothermal energy extraction, deep well drilling, aeroengines and gas turbines.

Frequency Modulation Approach for High Power Density 100 Hz Piezoelectric Vibration Energy Harvester.

Piezoelectric vibration energy harvester (PVEH) is a promising device for sustainable power supply of wireless sensor nodes (WSNs). PVEH is resonant and generates power under constant frequency vibration excitation of mechanical equipment. However, it cannot output high power through off-resonance if it has frequency offset in manufacturing, assembly and use. To address this issue, this paper designs and optimizes a PVEH to harvest power specifically from grid transformer vibration at 100 Hz with high power density of 5.28 µWmm-3g-2. Some resonant frequency modulation methods of PVEH are discussed by theoretical analysis and experiment, such as load impedance, additional mass, glue filling, axial and transverse magnetic force frequency modulation. Finally, efficient energy harvesting of 6.1 V output in 0.0226 g acceleration is tested in grid transformer reactor field application. This research has practical value for the design and optimization process of tunable PVEH for a specific vibration source.

Comparison of L-Shaped and U-Shaped Beams in Bidirectional Piezoelectric Vibration Energy Harvesting.

The traditional single degree of freedom linear piezoelectric vibration energy harvester (PVEH), such as the cantilever type, mainly works and resonates in a single direction and at a single frequency. To adapt broadband and bidirectional ambient vibration, this paper designs and compares two PVEHs of L-shaped beam and U-shaped beam through COMSOL simulation and prototype test. FEA modeling is introduced for accurate structure design with modal analysis, voltage frequency response analysis, and proof mass analysis with multiphysics electromechanical coupling simulation. Two PVEH prototypes with different gravity angles and clamping angles are tested at 0.1 g acceleration to find the optimal angle for maximum output power. The best clamping angle of L-PVEH is 135° with RMS power of 0.3 mW at 7.9 Hz, and that of U-PVEH is 45° with RMS power of 0.4 mW at 5.0 Hz. The proposed U-PVEH shows more advantages in low broadband and bidirectional vibration energy harvesting.

An ultrasensitive and stretchable strain sensor based on a microcrack structure for motion monitoring.

Flexible strain sensors are promising candidates for intelligent wearable devices. Among previous studies, although crack-based sensors have attracted a lot of attention due to their ultrahigh sensitivity, large strain usually causes fractures in the conductive paths. Because of the unstable crack structure, the tradeoff between sensitivity and workable strain range is still a challenge. As carbon nanotubes (CNTs) and silver nanowires (AgNWs) can form a strong interface with the thermoplastic substrate and strengthen the conductive network by capillary force during water evaporation, CNTs and AgNWs were deposited on electrospun TPU fiber mats via vacuum-assisted filtration in this work. The prestretching treatment constructed a microcrack structure that endowed the sensor with the combined characteristics of a wide working range (0~171% strain), ultrahigh sensitivity (a gauge factor of 691 within 0~102% strain, ~2 × 104 within 102~135% strain, and >11 × 104 within 135~171% strain), a fast response time (~65 ms), small hysteresis, and superior durability (>2000 cycles). Subsequently, the sensing mechanism of the sensor was studied. Distributed microcrack propagation based on the "island-bridge" structure was explained in detail, and its influence on the strain-sensing behavior of the sensor was analyzed. Finally, the sensor was assembled to monitor various vibration signals and human motions, demonstrating its potential applications in the fields of electronic skin and human health monitoring.

Real-time tracking of organ-shape and vessel-locations for surgical navigation using MEMS tri-axis magnetic sensors.

Laparoscopic surgery is less invasive to patients; however, fatal bleeding occurs when a surgeon misinterprets the anatomical location of the blood vessels. Therefore, we have proposed a location tracking system by generating an artificial magnetic field around a patient and attaching MEMS magnetic sensor nodes to certain locations of the patient's organs for real-time tracking of the organ shape and vessel locations. This paper presents the detailed system design and configuration. The results suggest that a high spatial resolution of 1-2 mm may be achieved by static and ultralow-frequency magnetic fields for rotation recognition of each sensor node and noise cancelation of the entire system. The algorithm for creating the navigation 'map' has been investigated from both efficiency and accuracy perspectives, which is essential for practical applications of the above system in surgical navigation.

Stress Distribution in Silicon Subjected to Atomic Scale Grinding with a Curved Tool Path.

Molecular dynamics (MD) simulations were applied to study the fundamental mechanism of nanoscale grinding with a modeled tool trajectory of straight lines. Nevertheless, these models ignore curvature changes of actual tool paths, which need optimization to facilitate understanding of the underlying science of the machining processes. In this work, a three-dimensional MD model considering the effect of tool paths was employed to investigate distributions of stresses including hydrostatic stress, von Mises stress, normal and shear stresses during atomic grinding. Simulation results showed that average values of the stresses are greatly influenced by the radius of the tool trajectory and the grinding depth. Besides the averaged stresses, plane stress distribution was also analyzed, which was obtained by intercepting stresses on the internal planes of the workpiece. For the case of a grinding depth of 25 Å and an arc radius 40 Å, snapshots of the stresses on the X-Y, X-Z and Y-Z planes showed internal stress concentration. The results show that phase transformation occurred from α- silicon to ß- silicon in the region with hydrostatic stress over 8 GPa. Moreover, lateral snapshots of the three-dimensional stress distribution are comprehensively discussed. It can be deduced from MD simulations of stress distribution in monocrystalline silicon with the designed new model that a curved tool trajectory leads to asymmetric distribution and concentration of stress during atomic-scale grinding. The analysis of stress distribution with varying curve geometries and cutting depths can aid fundamental mechanism development in nanomanufacturing and provide theoretical support for ultraprecision grinding.

Broadband vibration energy harvesting for wireless sensor node power supply in train container.

Wireless sensor nodes (WSNs) for temperature and humidity monitoring are commonly used in a cold chain logistics container. Energy harvesting technology is expected to realize the sustainable self-power supply for the WSN. Low amplitude and broadband vibration energy harvesting performance are the key points in train application. In this study, two piezoelectric vibration energy harvesters (PVEHs) are designed and simulated via COMSOL. Their low resonant frequencies and high electromechanical sensitivities are realized by big L-shaped mass blocks with different material densities. Their broadband vibration energy harvesting performance is achieved by the stopper and series connection. Experimental data are shown at an acceleration of 0.5 m/s2; PVEH-1 and PVEH-2 have maximum powers of 0.24 mW and 0.1 mW when excited at the resonant frequencies of 13.1 Hz and 18.8 Hz, respectively, and they both have the optimal load resistance of 40 kΩ. Two circuit design styles of two PVEHs, independent and series styles, are proposed for broadband vibration energy harvesting. Experimental results show that the series style has a wider operating frequency bandwidth and shorter charging time. Two PVEHs in series style can be effectively used for power supply of the temperature and humidity WSN in the broadband frequency range of 8.7-22.0 Hz above charging root mean square voltage of 5 V at the acceleration of 3.0 m/s2. This scheme is promised to be applied to the cold chain logistics train container.

Development of Implantable Wireless Sensor Nodes for Animal Husbandry and MedTech Innovation.

In this paper, we report the development, evaluation, and application of ultra-small low-power wireless sensor nodes for advancing animal husbandry, as well as for innovation of medical technologies. A radio frequency identification (RFID) chip with hybrid interface and neglectable power consumption was introduced to enable switching of ON/OFF and measurement mode after implantation. A wireless power transmission system with a maximum efficiency of 70% and an access distance of up to 5 cm was developed to allow the sensor node to survive for a duration of several weeks from a few minutes' remote charge. The results of field tests using laboratory mice and a cow indicated the high accuracy of the collected biological data and bio-compatibility of the package. As a result of extensive application of the above technologies, a fully solid wireless pH sensor and a surgical navigation system using artificial magnetic field and a 3D MEMS magnetic sensor are introduced in this paper, and the preliminary experimental results are presented and discussed.

A novel MEMS compatible lab-on-a-tube technology.

We present a novel lab-on-a-tube technology, which is a combination of three-dimensional (3D) cylindrical photolithography and nanoimprint processes, for fabricating microfunctional structures on a tiny tube substrate directly. As an example, electrochemical electrodes, which consisted of Pt work and Ag/AgCl reference electrodes, were successfully fabricated on a 330-µm-diameter polyimide capillary. Using thermal nanoimprint technology, a microdome array with a diameter of 2 µm to about 600 nm was prepared in the work and reference electrodes. The nanoimprinted domes greatly enhanced the electrochemical activity and there were much higher oxidation and reduction current peaks observed in cyclic voltammetry curves of the nanoimprinted electrode than those of the blank electrode without the nanoimprint modification. The nanoimprinted patterns exhibited complicated effects, e.g. the 600-nm-diameter dome sample has higher electrochemical activity than the 2-µm-diameter dome, while the latter has a larger surface. By using the new lab-on-a-tube technology, new bio- and nanomaterials could be integrated directly into electronic devices on tiny tube substrates so that many interesting applications could be expected in medical and life technologies.

Detection of volatile organic compounds by weight-detectable sensors coated with metal-organic frameworks.

Detection of volatile organic compounds (VOCs) using weight-detectable quartz microbalance and silicon-based microcantilever sensors coated with crystalline metal-organic framework (MOF) thin films is described in this paper. The thin films of two MOFs were grown from COOH-terminated self-assembled monolayers onto the gold electrodes of sensor platforms. The MOF layers worked as the effective concentrators of VOC gases, and the adsorption/desorption processes of the VOCs could be monitored by the frequency changes of weight-detectable sensors. Moreover, the MOF layers provided VOC sensing selectivity to the weight-detectable sensors through the size-selective adsorption of the VOCs within the regulated nanospace of the MOFs.

Development of a wireless sensor for the measurement of chicken blood flow using the laser Doppler blood flow meter technique.

Here, we report the development of an integrated laser Doppler blood flow micrometer for chickens. This sensor weighs only 18 g and is one of the smallest-sized blood flow meters, with no wired line, these are features necessary for attaching the sensor to the chicken. The structure of the sensor chip consists of two silicon cavities with a photo diode and a laser diode, which was achieved using the microelectromechanical systems technique, resulting in its small size and significantly low power consumption. In addition, we introduced an intermittent measuring arrangement in the measuring system to reduce power consumption and to enable the sensor to work longer. We were successfully able to measure chicken blood flow for five consecutive days, and discovered that chicken blood flow shows daily fluctuations.

Surface patterning of glass via electrostatic imprinting using a platinum mold.

Electrostatic imprinting is a highly suitable process for patterning large area and high efficiency glasses because it enables glass patterning at low temperatures with low pressures. Because high DC voltage bias is applied to the mold and glass during the thermal imprinting, the mold materials should have electrical conductivity, appropriate glass adhesion properties, and excellent thermal and electrochemical stability. In this study, thin Pt/Ni molds were fabricated via Si micromachining and electroforming techniques and were then used in the electrostatic imprint process in order to evaluate their feasibility as molds. Under the investigated process conditions, the pattern transfer to glass was accomplished without noticeable degradation of the mold. Furthermore, the process parameter effects on replication fidelity and potential defects were investigated.

Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers.

The x-ray reflectivity of an ultralightweight and low-cost x-ray optic using anisotropic wet etching of Si (110) wafers is evaluated at two energies, C K(alpha)0.28 keV and Al K(alpha)1.49 keV. The obtained reflectivities at both energies are not represented by a simple planar mirror model considering surface roughness. Hence, an geometrical occultation effect due to step structures upon the etched mirror surface is taken into account. Then, the reflectivities are represented by the theoretical model. The estimated surface roughness at C K(alpha) (approximately 6 nm rms) is significantly larger than approximately 1 nm at Al K(alpha). This can be explained by different coherent lengths at two energies.

Effects of rapid thermal annealing on nucleation, growth, and properties of lead zirconate titanate films.

The nucleation and growth behavior of solgel-derived lead zirconate titanate (PZT) films was investigated at different rapid thermal annealing (RTA) processes. The effects of RTA on PZT film surface morphology, crystal orientation, residual stress, and properties were also studied and are discussed. PZT nucleation and growth behavior were found to be more sensitive to heating rate than to hold time during RTA. Higher heating rates were preferred for uniform PZT nucleation and grain growth, which resulted in dense microstructures, smooth surfaces, and better film ferroelectric properties. Lower heating rates led to strong PZT (100) orientation, better film piezoelectric properties, and low residual stress, but at the risk of film cracks caused by arbitrarily distributed large crystallites with diameters of approximately 300 nm among crystallites with diameters of approximately 30 nm. Furthermore, the residual stress of the PZT film was found to be effectively reduced by extending the hold time.

Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers.

To develop x-ray mirrors for micropore optics, smooth silicon (111) sidewalls obtained after anisotropic wet etching of a silicon (110) wafer were studied. A sample device with 19 microm wide (111) sidewalls was fabricated using a 220 microm thick silicon (110) wafer and potassium hydroxide solution. For what we believe to be the first time, x-ray reflection on the (111) sidewalls was detected in the angular response measurement. Compared to ray-tracing simulations, the surface roughness of the sidewalls was estimated to be 3-5 nm, which is consistent with the atomic force microscope and the surface profiler measurements.